標題: 單晶銅、其製備方法及包含其之基板
作者: 陳智
杜經寧
呂佳凌
公開日期: 1-Mar-2015
摘要: 本發明係有關於一種單晶銅,其具有[100]方向,且體積係介於0.1~4.0×10 6 μm 3 。本發明更提供一種單晶銅之製備方法及包含其之基板。 The present invention relates to a Cu single crystal having [100] crystal orientation and a volume of 0.1~ 4.0×10 6 μm 3 . The present invention further provides a manufacturing method for Cu single crystals and a substrate comprising the same.
官方說明文件#: C25D003/38
C30B029/02
URI: http://hdl.handle.net/11536/122781
專利國: TWN
專利號碼: 201508099
Appears in Collections:Patents


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