標題: | High-performance poly-silicon TFTs using HfO2 gate dielectric |
作者: | Lin, CP Tsui, BY Yang, MJ Huang, RH Chien, CH 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | hafnium dioxide (HfO2);high dielectric-constant dielectric;thin-film transistors (TFTs) |
公開日期: | 1-五月-2006 |
摘要: | High-performance low-temperature poly-Si thin-film transistors (TFTs) using high-kappa (HFO2) gate dielectric is demonstrated for the first time. Because of the high gate capacitance density and thin equivalent-oxide thickness contributed by the high-kappa gate dielectric, excellent device performance can be achieved including high driving current, low subthreshold swing, low threshold voltage, and high ON/OFF current ratio. It should be noted that the O.N-state current of high-kappa. gate-dielectric TFTs is almost five times higher than that of SiO2 gate-dielectric TFTs. Moreover, superior threshold-voltage (V-th) rolloff property is also demonstrated. All of these results suggest that high-kappa gate dielectric is a good choice for high-performance TFTs. |
URI: | http://dx.doi.org/10.1109/LED.2006.872832 http://hdl.handle.net/11536/12305 |
ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2006.872832 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 27 |
Issue: | 5 |
起始頁: | 360 |
結束頁: | 363 |
顯示於類別: | 期刊論文 |