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dc.contributor.author張泰源en_US
dc.contributor.authorChang, Tai-Yuanen_US
dc.contributor.author張國明en_US
dc.contributor.author許博淵en_US
dc.contributor.authorChang, Kow-Mingen_US
dc.contributor.authorShew, Bor-Yuanen_US
dc.date.accessioned2015-11-26T00:56:13Z-
dc.date.available2015-11-26T00:56:13Z-
dc.date.issued2015en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#GT070051810en_US
dc.identifier.urihttp://hdl.handle.net/11536/126287-
dc.language.isoen_USen_US
dc.subject矽鍺zh_TW
dc.subject奈米線zh_TW
dc.subject生物感測器zh_TW
dc.subject氟強化鈍化處裡zh_TW
dc.subject靈敏度zh_TW
dc.subjectFluorine enhanced oxide passivationen_US
dc.subjectSiGeen_US
dc.subjectnanowireen_US
dc.subjectsensitivityen_US
dc.subjectbio-sensoren_US
dc.title具高靈敏度生物感測之矽锗奈米線於氟強化鈍化處裡技術應用之特性研究zh_TW
dc.titleInvestigation of Fluorine enhanced oxide passivation on SiGe nanowire with high sensitivity bio-sensoren_US
dc.typeThesisen_US
dc.contributor.department工學院加速器光源科技與應用碩士學位學程zh_TW
Appears in Collections:Thesis


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