標題: 預測干擾觀測器應用於半導體製程的隨機干擾
Predictive Disturbance Observer Structure Applied to Stochastic Disturbances of Semiconductor Process
作者: 蔡德修
Tsai, Te-Hsiu
李安謙
Lee, An-Chen
機械工程系所
關鍵字: 批次控制;隨機干擾;最小變異控制;干擾觀測器;Run-to-Run control;Stochastic Disturbance;Minimum Variance control;Disturbance Observer
公開日期: 2015
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070251086
http://hdl.handle.net/11536/126703
Appears in Collections:Thesis