標題: Low Temperature a-SiGe:H Near-IR Sensor and Photovoltaic Devices for Flexible Multi-functional Panel
作者: Kao, Ming-Hsuan
Shieh, Jia-Min
Shen, Chang-Hong
Yu, Peichen
Kuo, Hao-Chung
Lee, Ching-Ting
Yang, Fu-Liang
光電工程學系
Department of Photonics
公開日期: 1-Jan-2013
摘要: High Near-IR response photo-diode (0.1A/W@800nm) and high efficiency a-Si/a-SiGe tandem solar cell (8.38%) were demonstrated using high-density plasma-fabricated a-SiGe:H deposition technology with Si2H6 and GeH4 precursor. The low temperature (140 degrees C) a-SiGe: H films with low defect density (2.3x10(16)cm(-3)) are suitable for the applications of flexible solar self-powered multi-functional panel and 3D stacked monolithic devices.
URI: http://hdl.handle.net/11536/128500
ISBN: 978-1-55752-973-2
ISSN: 2160-9020
期刊: 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)
Appears in Collections:Conferences Paper