A Decouple structured Gyroscope with Integrated Readout Circuit on Standard 0.18 mu m 1P6M CMOS Technology

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DC 欄位	值	語言
dc.contributor.author	Chien, Chun-Lin	en_US
dc.contributor.author	Wen, Kuei-Ann	en_US
dc.date.accessioned	2017-04-21T06:49:19Z	-
dc.date.available	2017-04-21T06:49:19Z	-
dc.date.issued	2016	en_US
dc.identifier.isbn	978-1-5090-3219-8	en_US
dc.identifier.issn	2163-9612	en_US
dc.identifier.uri	http://hdl.handle.net/11536/134582	-
dc.description.abstract	A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) is used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791 mu W. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/degrees/s. Chip area is 1.9x1.7mm(2).	en_US
dc.language.iso	en_US	en_US
dc.subject	CMOS-MEMS	en_US
dc.subject	Gyroscope	en_US
dc.subject	readout circuit	en_US
dc.subject	capacitive sensing	en_US
dc.title	A Decouple structured Gyroscope with Integrated Readout Circuit on Standard 0.18 mu m 1P6M CMOS Technology	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2016 INTERNATIONAL SOC DESIGN CONFERENCE (ISOCC)	en_US
dc.citation.spage	15	en_US
dc.citation.epage	16	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:000392251200008	en_US
dc.citation.woscount	0	en_US
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