標題: Characteristics imrovement for flexible a-Si:H Thin Film Transistor with post treatment processes
作者: Teng, Li-Feng
Liu, Po-Tsun
Chou, Yi-Teh
Fan, Yang-Shun
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
公開日期: 2010
摘要: The performances of flexible a-Si:H TFTs on stainless foil with and without silicon nitride passivation layer were discussed in this study. The experiment results indicated the reliability of a-Si:H TFTs with passivation layer under mechanical strains was improved. That\'s related to the hydrogen passivating effect during deposition and post-annealing process.
URI: http://hdl.handle.net/11536/135585
ISSN: 1883-2490
期刊: IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3
起始頁: 2207
結束頁: 2209
Appears in Collections:Conferences Paper