Failure analysis of a MEMS micro-injector printing head

Title:	Failure analysis of a MEMS micro-injector printing head
Authors:	Lee, In-Yao Hsu, Tsung-Ping Wang, Wai W. Chiu, Yi Tang, Hua-Kun Tseng, Fan-Chung Lee, Kelvin 電控工程研究所 Institute of Electrical and Control Engineering
Issue Date:	2007
URI:	http://hdl.handle.net/11536/135666
ISBN:	978-1-4244-1014-9
Journal:	IPFA 2007: PROCEEDINGS OF THE 14TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS
Begin Page:	112
End Page:	+
Appears in Collections:	Conferences Paper