Title: | 背通道蝕刻型氧化銦鎢鋅薄膜電晶體技術之研究 Study on Back-Channel Etched of In-W-Zn-O Thin Film Transistors Technology |
Authors: | 張維晟 劉柏村 謝漢萍 Chang Wei-Cheng Liu, Po-Tsun Shieh, Han-Ping 光電工程研究所 |
Keywords: | 薄膜電晶體;背通道蝕刻;氧化銦鎢鋅;thin film transister;back channel etched;IWZO |
Issue Date: | 2016 |
URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070350565 http://hdl.handle.net/11536/139794 |
Appears in Collections: | Thesis |