應用CBR模式建立維修案例庫以提升工程師維修能力-以K公司為例

Abstract

隨著製程技術的快速演進，半導體產業中的晶圓針測（Chip Probing；CP）越顯重要，其目的乃針對晶片做電性功能的驗證測試，使wafer在進行封裝之前，能先行檢驗出電性功能不良的晶粒，避免不良品製造成本所帶來的浪費。本研究應用案例推理的方法改善設備工程師的作業模式，利用設備維修的歷史資料建立案例庫，提供工程師在執行維修作業時的參考依據，藉以降低分析時間，並減少需要驗證的步驟。透過維修案例庫的運用有效改善機台當機時間過長的問題，進而降低機台暫停生產所形成的產能損失，使得設備可以在短時間內恢復生產，對於設備指標平均修復時間（Mean Time To Repair，MTTR）和設備總綜合效率(Overall Equipment Effectiveness，OEE)有顯著的效益。

With the technical process rapid advance, CP(Chip Probing) process play an important role in Semi-conductor manufacturing, the purpose is testing the electrical function of the chip before wafer dicing to avoid cost wasted. This case study apply Case-Based Reasoning（CBR）to improve maintenance process of equipment engineer. To collect historical data of equipment maintenance to establish maintenance database to provide reference to engineers in order to decrease the analysis time and verification procedure. The application has improved the lengthy equipment down time problem and recover to get into the production in short period of time meanwhile reduce the loss of productivity. And MTTR and OEE% can be improved via CBR application.