標題: | 對稱式低金屬污染鎳金屬側向誘發結晶複晶矽薄膜電晶體之研究 Investigation on Symmetrical Ni Induced Lateral Crystallization Poly-Si TFTs with Low Metal Contaminations |
作者: | 王基琳 劉柏村 Wang, Ji-Lin Liu, Po-Tsun 光電工程研究所 |
關鍵字: | 複晶矽薄膜電晶體;金屬誘發結晶;低污染;對稱式;poly-Si thin film transistors;Ni induced lateral crystallization;low metal contaminations;symmectrical |
公開日期: | 2017 |
URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070450552 http://hdl.handle.net/11536/142050 |
Appears in Collections: | Thesis |