矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究

標題:	矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究 The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN
作者:	陳威儒張立 Chen, Wei-Lu Chang, Li 材料科學與工程學系所
關鍵字:	磊晶;氧化鋯;氮化鋯;微波電漿氮化;雙金剛烷;鑽石;epitaxial;ZrO2;ZrN;MPCVD;nitridation;diamantane;diamond
公開日期:	2017
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451533 http://hdl.handle.net/11536/142319
Appears in Collections:	Thesis