標題: Cathodoluminescence study of defects in thermal treatment of zinc titanate thin films deposited by a cosputtering process
作者: Chiang, Tun-Yuan
Tsai, Chien-Huang
Huang, Ming-Chao
Wen, Hua-Chiang
Chou, Wu-Ching
電子物理學系
Department of Electrophysics
關鍵字: backscattering electron microscopy;cathodoluminescence;radio frequency magnetron cosputtering
公開日期: 1-May-2018
摘要: The effects of thermal treatment of polycrystalline ZnO-TiO2 systems on their luminescence emission and phase properties were investigated using ex situ cathodoluminescence and back-scattering electron microscopy. The main features of the spectrum are a blue band at 2.75 eV for the phase of TiO and a complex visible band at 2.18 eV for the phase of ZnO, whose peak intensity depends on the annealing temperature. The spectrum intensity is dominated by the ZnO phase when annealing temperature was 720 degrees C, which is attributed to abnormal grain growth. Competition is observed between the broad band peaked at 2.18 eV and visible band peaked at 2.75 eV as the annealing temperature changed (820 degrees C-920 degrees C). The cathodoluminescence density is gradually governed by the TiO2 phase, and the emission in polychromatic and monochromatic imaging is stronger equally at 920 degrees C. The nucleation of the TiO2 and ZnO grains is present in the backscattering electron images as well.
URI: http://dx.doi.org/10.1002/sia.6394
http://hdl.handle.net/11536/144861
ISSN: 0142-2421
DOI: 10.1002/sia.6394
期刊: SURFACE AND INTERFACE ANALYSIS
Volume: 50
起始頁: 541
結束頁: 546
Appears in Collections:Articles