標題: The Effect of Oxygen Vacancy Concentration on Indium Gallium Oxide Solar Blind Photodetector
作者: Chen, Kuan-Yu
Hsu, Ching-Chien
Yu, Hsin-Chieh
Peng, Yu-Ming
Yang, Chih-Chiang
Su, Yan-Kuin
照明與能源光電研究所
Institute of Lighting and Energy Photonics
關鍵字: Indium-gallium-oxide (IGO);oxygen concentrations;solar-blind photodetectors
公開日期: 1-May-2018
摘要: In this paper, amorphous indium-gallium-oxide solar-blind metal-semiconductor-metal photodetectors were fabricated by using co-sputtering method. Three samples with different oxygen concentrations, namely, sample A without oxygen, sample B with 2% oxygen concentration, and sample C with 4% oxygen concentration, were investigated. The applied bias was 5 V during device characterization. The ultraviolet (UV)-to-visible rejection ratios were 39, 9.9 x 10(3), and 1.1 x 10(5) for samples A, B, and C, respectively. The dynamic responses of the decay times were 5.79/52.12 s, 1.96/30.49 s, and 0.02/0.75 s for samples A, B, and C, respectively. In summary, the 4% oxygen concentration sample exhibited excellent UV-to-visible rejection ratio and superior decay time.
URI: http://dx.doi.org/10.1109/TED.2018.2817637
http://hdl.handle.net/11536/144894
ISSN: 0018-9383
DOI: 10.1109/TED.2018.2817637
期刊: IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume: 65
起始頁: 1817
結束頁: 1822
Appears in Collections:Articles