標題: Atomically resolved interface structure between epitaxial TiN film and MgO substrate
作者: Wei, Lin-Lung
Yen, Tzu-Chun
Do, Hien
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Interface;Epitaxial;Scanning transmission electron microscopy
公開日期: 1-Nov-2016
摘要: In this study, we used a high quality epitaxial TiN thin film grown on MgO (001) substrate for the investigation of the TiN/MgO interface structure which was characterized with scanning transmission electron microscopy (STEM) at atomic resolution. Analyses of high angle annular dark-field and annular bright-field STEM image contrast with X-ray energy dispersive spectroscopy maps show that a 2-4 nm diffuse interlayer of mixed compositions exists coherently between TiN and MgO with the same structure and across the interface the ionic bonding sequences are maintained without any interruption. (C) 2016 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2016.07.037
http://hdl.handle.net/11536/145761
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2016.07.037
期刊: THIN SOLID FILMS
Volume: 618
起始頁: 8
結束頁: 12
Appears in Collections:Articles