New fabrication for DSRRs nanostructure in optics

Abstract

The Deformed-Split-Ring Resonators (DSRRs) require metal nanostructure on high transmission material substrate for optical application. In this article, a simple method of fabricating three-dimensional polymer nanostructure that use an UV-curable polymer as the resist is discussed. Because UV cure imprinting has high resolution which is about 100nm and high transparency, it is ideally suited for photonic and meta-material optical device applications. The fabrication combines several mass production technologies. The first one is photolithography, such as a stepper UV exposure system can make the nano scale pattern in photoresist, the second is to change the photoresist sample to become the nanoimprint mould by precise electroforming, the third is to use UV cure imprinting to transfer the DSRRs pattern on the UV-curable polymer. Finally, it is also the most important process is that to coat metals and metal lift-off that coating Ag to become buffer layer by sputter, then coating Au into the nanostructure and lift off Ag by HNO3. The DSRR structure is implemented in high transmission UV-curable polymer with Au.