Title: | Latchup in Bulk FinFET Technology |
Authors: | Dai, C. -T. Chen, S. -H. Linten, D. Scholz, M. Hellings, G. Boschke, R. Karp, J. Hart, M. Groeseneken, G. Ker, M. -D. Mocuta, A. Horiguchi, N. 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
Keywords: | Latchup;bulk FinFET;silicon control rectifier (SCR) |
Issue Date: | 1-Jan-2017 |
Abstract: | Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased in bulk FinFET technology. |
URI: | http://hdl.handle.net/11536/146847 |
ISSN: | 1541-7026 |
Journal: | 2017 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS) |
Appears in Collections: | Conferences Paper |