Title: Latchup in Bulk FinFET Technology
Authors: Dai, C. -T.
Chen, S. -H.
Linten, D.
Scholz, M.
Hellings, G.
Boschke, R.
Karp, J.
Hart, M.
Groeseneken, G.
Ker, M. -D.
Mocuta, A.
Horiguchi, N.
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: Latchup;bulk FinFET;silicon control rectifier (SCR)
Issue Date: 1-Jan-2017
Abstract: Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased in bulk FinFET technology.
URI: http://hdl.handle.net/11536/146847
ISSN: 1541-7026
Journal: 2017 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)
Appears in Collections:Conferences Paper