Latchup in Bulk FinFET Technology

Dai, C. -T.; Chen, S. -H.; Linten, D.; Scholz, M.; Hellings, G.; Boschke, R.; Karp, J.; Hart, M.; Groeseneken, G.; Ker, M. -D.; Mocuta, A.; Horiguchi, N.

Latchup in Bulk FinFET Technology

Date

2017-01-01

Authors

Abstract

Latchup (LU) had been considered to be less important in advanced CMOS technologies. However, I/O interface and analog applications can still operate at high voltage (e.g., 1.8V or 3.3V) in sub-20nm bulk FinFET technologies. LU threats are never eliminated and the sensitivity towards LU is increased in bulk FinFET technology.

Keywords

Latchup , bulk FinFET , silicon control rectifier (SCR)

URI

https://ir.lib.nycu.edu.tw/handle/11536/146847

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會議論文;;Conferences Paper

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Latchup in Bulk FinFET Technology

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