標題: | Detection of Particulate Matter of Size 2.5 m with a Surface-Acoustic-Wave Sensor Combined with a Cyclone Separator |
作者: | Kuo, Fung-Yu Lin, Ying-Chen Ke, Ling-Yi Tsai, Chuen-Jinn Yao, Da-Jeng 環境工程研究所 Institute of Environmental Engineering |
關鍵字: | cyclone separator;surface-acoustic-wave sensor;environmental sensing;PM2;5 |
公開日期: | 1-八月-2018 |
摘要: | A device to monitor particulate matter of size 2.5 m (PM2.5) that has been designed and developed includes a surface-acoustic-wave sensor operating in a shear horizontal mode (SH-SAW) combined with a cyclone separator. In our tests, aerosols generated as incense smoke were first separated and sampled inside a designed cyclone separator; the sampled PM2.5 was then introduced into the sensing area of an SH-SAW sensor for detection. The use of microcentrifuge tubes as a cyclone separator effectively decreases the size and power consumption of the device; the SAW sensor in a well design and operating at 122 MHz was fabricated with MEMS techniques. After an explanation of the design of the cyclone separator, a simulation of the efficiency and the SAW sensor detection are discussed. A microcentrifuge tube (volume 0.2 mL, inlet and outlet diameters 0.5 mm) as a separator has separation cutoff diameters 50% (d(50)) at 2.5 m; the required rate of volumetric flow at the inlet is 0.125 LPM, according to simulation with computational fluid dynamics (CFD) software; the surface-acoustic-wave (SAW) sensor exhibits sensitivity approximately 9 Hz/ng; an experiment for PM2.5 detection conducted with the combined device shows a strong positive linear correlation with a commercial aerosol monitor. The limit of detection (LOD) is 11 g/m(3) with sample time 160 s and total detection duration about 5 min. |
URI: | http://dx.doi.org/10.3390/mi9080398 http://hdl.handle.net/11536/148075 |
ISSN: | 2072-666X |
DOI: | 10.3390/mi9080398 |
期刊: | MICROMACHINES |
Volume: | 9 |
顯示於類別: | 期刊論文 |