Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations

標題:	Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations
作者:	Chen, Cheng-An Chiu, Yi 電機工程學系 Department of Electrical and Computer Engineering
關鍵字:	scanning mirror;vertical comb drive;flip-up;assembly
公開日期:	2011
摘要:	A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.
URI:	http://hdl.handle.net/11536/14870
ISBN:	978-1-4577-0336-2
期刊:	OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS
起始頁:	189
結束頁:	190
Appears in Collections:	Conferences Paper