標題: | Substrate engineering of LaAlO3 for non-polar ZnO growth |
作者: | Ho, Yen-Teng Wang, Wei-Lin Peng, Chun-Yen Chen, Wei-Chun Liang, Mei-Hui Tian, Jr-Sheng Chang, Li 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | ZnO;LaAlO3;Epitaxial growth;Diffraction |
公開日期: | 31-Mar-2010 |
摘要: | We demonstrate that growth of non-polar ZnO in a-plane and m-plane can be achieved through substrate engineering of LaAlO3 with (001) and (112) surface X-ray diffraction, reflection high energy electron diffraction and cross-sectional transmission electron microscopy with selected area diffraction reveal that a-plane ZnO on LaAlO3 (001) consists of two types of domains perpendicular to each other with in-plane orientation relationships of [000](ZnO)//[1 (1) over bar0](LAO) and [1 (1) over tilde 00](ZnO)//[1 (1) over bar0](LAO) Single domain epitaxy of m-plane ZnO on LaAlO3 (112) can be obtained with in-plane orientation relationships of (10 (1) over bar0)(ZnO)//(112)(LAO), [0001](ZnO)//[(1) over bar 10](LAO) and [1 (2) over bar 10](ZnO)//[(1) over bar(1) over bar1](LAO). (C) 2009 Elsevier B.V All rights reserved |
URI: | http://dx.doi.org/10.1016/j.tsf.2009.08.013 http://hdl.handle.net/11536/149921 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2009.08.013 |
期刊: | THIN SOLID FILMS |
Volume: | 518 |
起始頁: | 2988 |
結束頁: | 2991 |
Appears in Collections: | Articles |