FABRICATION METHOD FOR TWO-DIMENSIONAL MATERIALS

標題:	FABRICATION METHOD FOR TWO-DIMENSIONAL MATERIALS
作者:	Tuo-Hung HOU Jyun-Hong Huang
公開日期:	11-Oct-2018
摘要:	A fabrication method for two-dimensional materials of the present invention includes the following steps: forming a thin film having at least one two-dimensional element on a substrate; forming at least one capping layer on the thin film; annealing the thin film to form a two-dimensional material film after the capping layer is formed.
官方說明文件#:	C23C016/50 C23C016/56 C23C016/52 C23C016/448 C23C014/34 C23C014/24 C23C014/06 C23C014/58
URI:	http://hdl.handle.net/11536/151441
專利國:	USA
專利號碼:	20180291508
Appears in Collections:	Patents

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