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dc.contributor.authorLin, Yu-Hsienen_US
dc.contributor.authorChien, Chao-Hsinen_US
dc.date.accessioned2014-12-08T15:22:22Z-
dc.date.available2014-12-08T15:22:22Z-
dc.date.issued2012-03-01en_US
dc.identifier.issn1536-125Xen_US
dc.identifier.urihttp://dx.doi.org/10.1109/TNANO.2011.2179062en_US
dc.identifier.urihttp://hdl.handle.net/11536/15835-
dc.description.abstractIn this paper, we demonstrate 50-nm trigate nonvolatile HfO2 nanocrystal memory devices on silicon-on-insulator wafers. The proposed technique, which is fully compatible with current CMOS technologies, is used to form highly localized HfO2 nanocrystals for application in nonvolatile flash memory. We successfully scale down conventional nonvolatile floating gate memories below the 50-nm node to achieve nanodevices for application in next-generation nonvolatile memories.en_US
dc.language.isoen_USen_US
dc.subjectFlash memoryen_US
dc.subjecthafnium oxideen_US
dc.subjectnanocrystalsen_US
dc.subjectnonvolatile memoriesen_US
dc.titleNanoscale 2-Bit/Cell HfO2 Nanocrystal Flash Memoryen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/TNANO.2011.2179062en_US
dc.identifier.journalIEEE TRANSACTIONS ON NANOTECHNOLOGYen_US
dc.citation.volume11en_US
dc.citation.issue2en_US
dc.citation.spage412en_US
dc.citation.epage417en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000301420900028-
dc.citation.woscount3-
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