Micromachining program status at the SRRC

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DC Field	Value	Language
dc.contributor.author	Cheng, Y	en_US
dc.contributor.author	Shew, BY	en_US
dc.contributor.author	Shih, WP	en_US
dc.contributor.author	Wang, SS	en_US
dc.contributor.author	Lin, CY	en_US
dc.contributor.author	Yang, WK	en_US
dc.contributor.author	Lu, M	en_US
dc.contributor.author	Lee, WH	en_US
dc.date.accessioned	2014-12-08T15:01:16Z	-
dc.date.available	2014-12-08T15:01:16Z	-
dc.date.issued	1997-12-01	en_US
dc.identifier.issn	0946-7076	en_US
dc.identifier.uri	http://hdl.handle.net/11536/160	-
dc.description.abstract	This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.	en_US
dc.language.iso	en_US	en_US
dc.title	Micromachining program status at the SRRC	en_US
dc.type	Article; Proceedings Paper	en_US
dc.identifier.journal	MICROSYSTEM TECHNOLOGIES	en_US
dc.citation.volume	4	en_US
dc.citation.issue	1	en_US
dc.citation.spage	12	en_US
dc.citation.epage	16	en_US
dc.contributor.department	交大名義發表	zh_TW
dc.contributor.department	National Chiao Tung University	en_US
dc.identifier.wosnumber	WOS:000071130700004	-
Appears in Collections:	Conferences Paper

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