Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib

標題:	Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
作者:	Jhuo, Long-Cai Kim, Sung-O 光電工程學系 Department of Photonics
公開日期:	2006
摘要:	A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressure from 300 to 800 Torr and having hexagonal structure, 5x5 arrays of micro-plasma device have been investigated. The driving voltaged is lower than 250 V.
URI:	http://hdl.handle.net/11536/17366
ISSN:	1738-7558
期刊:	IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS
起始頁:	21
結束頁:	23
Appears in Collections:	Conferences Paper