Design and implementation of an intelligent manufacturing execution system for semiconductor manufacturing industry

Abstract

This paper proposed an intelligent MES by integrating manufacturing execution system, data warehouse, online analytical processing and data mining system. The data warehouse for this system is provided by the massive amounts of data gathered from a MES. Through some process of integrating MES with data warehouses, data warehouses with decision analysis, and decision analysis with data mining systems. A three-tiered web-based systematic framework has been established. The result of this study is the integration of the MES and data mining system. According to experimental analysis, the product yield and the manufacturing cycle time all have been improved for manufacturing industry.