Microwave coplanar filters on Si substrates

標題:	Microwave coplanar filters on Si substrates
作者:	Chan, KT Chin, A Kuo, JT Chang, CY Duh, DS Lin, WJ Zhu, CX Li, MF Kwong, DL 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	2003
摘要:	High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrate using proton implantation process. Very good insertion loss and filter characteristics close to ideal E-M simulation are. measured that demonstrates the excellent filter performance to 91 GHz.
URI:	http://hdl.handle.net/11536/18547
ISBN:	0-7803-7695-1
ISSN:	0149-645X
期刊:	2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3
起始頁:	1909
結束頁:	1912
Appears in Collections:	Conferences Paper