Title: Scrap rules for small lots in wafer fabrication
Authors: Wu, MC
Chiou, CW
Hsu, HM
工業工程與管理學系
Department of Industrial Engineering and Management
Issue Date: 2002
Abstract: This paper presents a genetic algorithm for determining the-rules for scrapping small lots in a semiconductor fab. Small lots are lots which carry less than 25 wafers due to yield problem. Simulation results show that the proposed approach can increase contribution margin up to 24% in the case of low yield and high average, selling price.
URI: http://hdl.handle.net/11536/18933
ISBN: 0-7803-7604-8
Journal: 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP
Begin Page: 187
End Page: 190
Appears in Collections:Conferences Paper