Title: | Scrap rules for small lots in wafer fabrication |
Authors: | Wu, MC Chiou, CW Hsu, HM 工業工程與管理學系 Department of Industrial Engineering and Management |
Issue Date: | 2002 |
Abstract: | This paper presents a genetic algorithm for determining the-rules for scrapping small lots in a semiconductor fab. Small lots are lots which carry less than 25 wafers due to yield problem. Simulation results show that the proposed approach can increase contribution margin up to 24% in the case of low yield and high average, selling price. |
URI: | http://hdl.handle.net/11536/18933 |
ISBN: | 0-7803-7604-8 |
Journal: | 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP |
Begin Page: | 187 |
End Page: | 190 |
Appears in Collections: | Conferences Paper |