Fabrication and characterization of the Pd-silicided emitters for field-emission devices

標題:	Fabrication and characterization of the Pd-silicided emitters for field-emission devices
作者:	Wang, CC Ku, TK Feng, MS Hsieh, IJ Cheng, HC 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
關鍵字:	Pd silicided;field emitter;micromachining;sharpening;annealing;TEM;AES
公開日期:	1995
URI:	http://hdl.handle.net/11536/19969 http://dx.doi.org/10.1117/12.220936
ISBN:	0-8194-2007-7
DOI:	10.1117/12.220936
期刊:	MICROELECTRONIC STRUCTURES AND MICROELECTROMECHANICAL DEVICES FOR OPTICAL PROCESSING AND MULTIMEDIA APPLICATIONS
Volume:	2641
起始頁:	145
結束頁:	152
Appears in Collections:	Conferences Paper

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.