標題: Rapid thermal chemical vapor deposition of nitrogen-doped polysilicon for high-performance and high-reliability CMOS technology
作者: Sun, SC
Wang, LS
Yeh, FL
電機學院
College of Electrical and Computer Engineering
公開日期: 1995
URI: http://hdl.handle.net/11536/20006
ISBN: 1-55899-290-1
ISSN: 0272-9172
期刊: RAPID THERMAL AND INTEGRATED PROCESSING IV
Volume: 387
起始頁: 329
結束頁: 334
顯示於類別:會議論文