標題: RAPID THERMAL-OXIDATION OF LIGHTLY DOPED SILICON IN N2O
作者: SUN, SC
WANG, LS
YEH, FL
LAI, TS
LIN, YH
奈米中心
Nano Facility Center
公開日期: 1994
URI: http://hdl.handle.net/11536/20140
ISBN: 1-55899-242-1
ISSN: 0272-9172
期刊: RAPID THERMAL AND INTEGRATED PROCESSING III
Volume: 342
起始頁: 181
結束頁: 186
Appears in Collections:Conferences Paper