RAPID THERMAL-OXIDATION OF LIGHTLY DOPED SILICON IN N2O

Title:	RAPID THERMAL-OXIDATION OF LIGHTLY DOPED SILICON IN N2O
Authors:	SUN, SC WANG, LS YEH, FL LAI, TS LIN, YH 奈米中心 Nano Facility Center
Issue Date:	1994
URI:	http://hdl.handle.net/11536/20140
ISBN:	1-55899-242-1
ISSN:	0272-9172
Journal:	RAPID THERMAL AND INTEGRATED PROCESSING III
Volume:	342
Begin Page:	181
End Page:	186
Appears in Collections:	Conferences Paper