| 標題: | Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS |
| 作者: | Liou, C. H. Chiu, Y. Shieh, H. P. D. Chiou, J. C. 電機資訊學士班 Undergraduate Honors Program of Electrical Engineering and Computer Science |
| 關鍵字: | near-field scanning optical microscope;CMOS-MEMS;photodetector;side photodetector;transimpedance amplifier |
| 公開日期: | 2012 |
| 摘要: | A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed. |
| URI: | http://hdl.handle.net/11536/20346 |
| ISBN: | 978-1-4577-1513-6 |
| 期刊: | 2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) |
| 起始頁: | 168 |
| 結束頁: | 169 |
| Appears in Collections: | Conferences Paper |
- 利用 CMOS-MEMS 技術與乾蝕刻 製作之微光點量測系統 / 劉俊宏;Liou, Chun-Hung;邱一;Chiu, Yi
- 利用微機電技術製造之微光點形狀量測系統 / 張文中;Wen-Chung Chang;邱一;Yi Chiu
- 利用CMOS-MEMS 技術製作之微光點量測系統 / 張子麟;Chang, Tzu-Lin;邱一;Chiu, Yi
- 利用SOI製作之吸收式微型光點形狀量測系統 / 潘均宏;Chun-Hung Pan;邱一;Yi Chiu
- Imaging properties of three dimensional aperture near-field scanning optical microscopy and optimized near-field fiber probe designs / Chau, YF;Yang, TJ;Tsai, DP
- An optical lever approach to photodetector measurements of the pickup-head flying height in an optical disk drive / Hsiao, C. C.;Peng, C. Y.;Liu, T. S.
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