Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS

Title:	Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS
Authors:	Liou, C. H. Chiu, Y. Shieh, H. P. D. Chiou, J. C. 電機資訊學士班 Undergraduate Honors Program of Electrical Engineering and Computer Science
Keywords:	near-field scanning optical microscope;CMOS-MEMS;photodetector;side photodetector;transimpedance amplifier
Issue Date:	2012
Abstract:	A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
URI:	http://hdl.handle.net/11536/20346
ISBN:	978-1-4577-1513-6
Journal:	2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)
Begin Page:	168
End Page:	169
Appears in Collections:	Conferences Paper

APA	Liou, C. H., Chiu, Y., Shieh, H. P. D., & Chiou, J. C. (2012). Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS. WOS:000309942400080.
Bibtex	@article{Liou2012Design, title={Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS}, author={Liou, C. H. and Chiu, Y. and Shieh, H. P. D. and Chiou, J. C.}, journal={WOS:000309942400080}, year={2012}, url={https://ir.lib.nycu.edu.tw/handle/11536/20346}, }