| 標題: | Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS |
| 作者: | Liou, C. H. Chiu, Y. Shieh, H. P. D. Chiou, J. C. 電機資訊學士班 Undergraduate Honors Program of Electrical Engineering and Computer Science |
| 關鍵字: | near-field scanning optical microscope;CMOS-MEMS;photodetector;side photodetector;transimpedance amplifier |
| 公開日期: | 2012 |
| 摘要: | A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed. |
| URI: | http://hdl.handle.net/11536/20346 |
| ISBN: | 978-1-4577-1513-6 |
| 期刊: | 2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) |
| 起始頁: | 168 |
| 結束頁: | 169 |
| 顯示於類別： | 會議論文 |
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