Rapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometry

Title:	Rapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometry
Authors:	Chuang, Chun-I Lin, Shiuan-Huei Chao, Yu-Faye 電子物理學系光電工程學系 Department of Electrophysics Department of Photonics
Keywords:	Uniaxial;Phase modulated ellipsometry;Genetic algorithm;Refractive index;Orientation of optical axis
Issue Date:	1-Jul-2013
Abstract:	An improved phase modulated technique has been implemented to increase the speed and accuracy of optical parameters extraction for a uniaxial bulk media. In combination of the genetic algorithm, we show that not only the complex refractive indices, the inclination and azimuth angles of optical axis can also be extracted. Furthermore, by using a two-probe-beam configuration, the speed of convergence can be improved by 5-times. Such a high speed and accurate method can be applied for the in-situ measurement of dynamic materials. (C) 2013 Elsevier Ltd. All rights reserved.
URI:	http://dx.doi.org/10.1016/j.optlaseng.2013.02.004 http://hdl.handle.net/11536/21630
ISSN:	0143-8166
DOI:	10.1016/j.optlaseng.2013.02.004
Journal:	OPTICS AND LASERS IN ENGINEERING
Volume:	51
Issue:	7
Begin Page:	861
End Page:	866
Appears in Collections:	Articles

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