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dc.contributor.authorChen, Ching-Enen_US
dc.contributor.authorChang, Ting-Changen_US
dc.contributor.authorLo, Hung-Pingen_US
dc.contributor.authorHo, Szu-Hanen_US
dc.contributor.authorLo, Wen-Hungen_US
dc.contributor.authorTseng, Tseung-Yuenen_US
dc.contributor.authorCheng, Osberten_US
dc.contributor.authorHuang, Cheng Tungen_US
dc.date.accessioned2014-12-08T15:32:45Z-
dc.date.available2014-12-08T15:32:45Z-
dc.date.issued2012en_US
dc.identifier.isbn978-1-60768-313-1en_US
dc.identifier.issn1938-5862en_US
dc.identifier.urihttp://hdl.handle.net/11536/22894-
dc.identifier.urihttp://dx.doi.org/10.1149/1.3700891en_US
dc.description.abstractA novel method, called random telegraphy signal (RTS), was constructed to characterize the gate oxide quality and reliability of metal-oxide-semiconductor field-effect-transistors (MOSFETs). With the aggressive scaling of device size, drain current RTS (I-D-RTS) become a critical role in carrier transport of MOSFETs. Besides, RTS in gate leakage current (I-G-RTS) was denoted as the other new method to understand property of gate oxide. Recently, the study of RTS has also been made in MOSFETs with metal gate and high dielectric constant (metal gate/high-k). However, the RTS in partial depleted silicon-on-insulator MOSFETs (PD SOI MOSFETs) has not comprehensively been studied yet. This paper investigates RTS characteristics in PD SOI MOSFETs.en_US
dc.language.isoen_USen_US
dc.titleInvestigation of Random Telegraph Signal with PD SOI MOSFETsen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1149/1.3700891en_US
dc.identifier.journalDIELECTRICS FOR NANOSYSTEMS 5: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING -AND-TUTORIALS IN NANOTECHNOLOGY: MORE THAN MOORE - BEYOND CMOS EMERGING MATERIALS AND DEVICESen_US
dc.citation.volume45en_US
dc.citation.issue3en_US
dc.citation.spage261en_US
dc.citation.epage271en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000325405800026-
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