標題: Effects of N-2 and O-2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator-semiconductor structures
作者: Kao, Chyuan Haur
Chen, Hsiang
Lee, Ming Ling
Liu, Che Chun
Ueng, Herng-Yih
Chu, Yu Cheng
Chen, Ching Bang
Chang, Kow Ming
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: CeO2;O-2 and N-2 annealing;Electrolyte-insulator-semiconductor;Material quality;Sensing performance
公開日期: 1-Apr-2014
摘要: A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N-2 and O-2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 degrees C in O-2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N-2 ambience. Oxygen in O-2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O-2 annealing ambience. (C) 2014 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.snb.2013.12.103
http://hdl.handle.net/11536/23751
ISSN: 0925-4005
DOI: 10.1016/j.snb.2013.12.103
期刊: SENSORS AND ACTUATORS B-CHEMICAL
Volume: 194
Issue: 
起始頁: 503
結束頁: 510
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