標題: The ellipsometric measurements of a curved surface
作者: Lee, KY
Chao, YF
光電工程學系
Department of Photonics
關鍵字: topography;imaging ellipsometry;refractive index profile
公開日期: 2005
摘要: A three-intensity imaging ellipsometric technique is proposed to investigate the surface topography as well as the refractive index profile (RIP) of a lens. The azimuth deviation of polarizer caused by the tilting of a SiO2 thin film on Si substrate was investigated after a careful calibration on the azimuth position of polarizer of the water-surface. The azimuth deviation of polarizer is proved to be the local surface normal; thus we can determine not only the radius of curvature of a Plano-Convex lens from the measurement, but also its incident-angle-corrected RIP.
URI: http://hdl.handle.net/11536/25488
http://dx.doi.org/10.1143/JJAP.44.L1015
ISSN: 0021-4922
DOI: 10.1143/JJAP.44.L1015
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume: 44
Issue: 28-32
起始頁: L1015
結束頁: L1018
Appears in Collections:Articles


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