標題: Characteristics of MIS Solar Cells Using Sputtering SiO(2) Insulating Layers
作者: Chang, Tzu-Yueh
Chang, Chun-Lung
Lee, Hsin-Yu
Lee, Po-Tsung
光電工程學系
Department of Photonics
公開日期: 1-Jan-2010
摘要: In this study, the characteristics of both p-type and n-ype Metal-Insulator-Semiconductor (MIS) solar cells with sputtering SiO(2) insulating layers fabricated by radio-frequency (RF) magnetron sputtering are investigated. The characteristics of MIS solar cells are considerably affected by the thickness of the SiO(2) insulating layer and a hydrogen (H(2)) annealing process. Moreover, the performance of MIS solar cells with sputtering SiO(2) insulating layer can be greatly enhanced by depositing a SiN(x) passivation layer on top. It suggests that a sputtering SiO(2) insulating layer is a good alternative insulating layer for MIS solar cells.
URI: http://hdl.handle.net/11536/27020
ISBN: 978-1-4244-5891-2
ISSN: 0160-8371
期刊: 35TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE
Volume: 
Issue: 
起始頁: 
結束頁: 
Appears in Collections:Conferences Paper