標題: | A Flexible Microwave De-Embedding Method for On-Wafer Noise Parameter Characterization of MOSFETs |
作者: | Wang, Yueh-Hua Cho, Ming-Hsiang Wu, Lin-Kun 電信工程研究所 Institute of Communications Engineering |
關鍵字: | de-embedding;microwave;MOSFETs;noise;RF;silicon |
公開日期: | 1-九月-2009 |
摘要: | A flexible noise de-embedding method for on-wafer microwave measurements of silicon MOSFETs is presented in this study. We use the open, short, and thru dummy structures to subtract the parasitic effects from the probe pads and interconnects of a fixtured MOS transistor. The thru standard are used to extract the interconnect parameters for subtracting the interconnect parasitics in gate, drain, and source terminals of the MOSFET. The parasitics of the dangling leg in the source terminal are also modeled and taken into account in the noise de-embedding procedure. The MOS transistors and de-embedding dummy structures were fabricated in a standard CMOS process and characterized up to 20 GHz. Compared with the conventional de-embedding methods, the proposed technique is accurate and area-efficient. |
URI: | http://dx.doi.org/10.1587/transele.E92.C.1157 http://hdl.handle.net/11536/27487 |
ISSN: | 0916-8524 |
DOI: | 10.1587/transele.E92.C.1157 |
期刊: | IEICE TRANSACTIONS ON ELECTRONICS |
Volume: | E92C |
Issue: | 9 |
起始頁: | 1157 |
結束頁: | 1162 |
顯示於類別: | 會議論文 |