標題: Metallo-organic chemical vapor deposition of tantalum carbide and tantalum nitride thin films from (BuCH)-Bu-t=Ta(CH2 Bu-t)(3) and (BuN)-Bu-t=Ta(CH2 Bu-t)(3).
作者: Chiu, HT
Chang, YH
Chang, PJ
Wu, JB
Peng, SM
Lee, GH
應用化學系
Department of Applied Chemistry
公開日期: 7-Apr-2002
URI: http://hdl.handle.net/11536/28863
ISSN: 0065-7727
期刊: ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume: 223
Issue: 
起始頁: A48
結束頁: A48
Appears in Collections:Articles