标题: Dielectric tunability of barium strontium titanate films prepared by a sol-gel method
作者: Nayak, M
Tseng, TY
电子工程学系及电子研究所
Department of Electronics Engineering and Institute of Electronics
关键字: barium strontium titanate;dielectric properties;electrical properties and measurement
公开日期: 3-四月-2002
摘要: The electric field tuning property of the 100-kHz dielectric constant of Ba0.5Sr0.5TiO3 (BST) thin films deposited on Pt/Ti/SiO2/Si substrates by a hydroxide-alkoxide-based sol-gel method was investigated by varying the annealing temperature, the thickness and the precursor solution concentration. The tunability and dielectric constant of the BST thin films increased with increasing annealing temperature, indicating the dependence of the tunability on parameters of the film quality, such as crystallinity and grain size. A similar to 235-nm film annealed at 700 degreesC showed tunability of approximately 48%. Variation of the precursor solution concentration resulted in a different microstructure, which in turn affected the tunability of the film. The dielectric tunability of the film showed a small increase as the film thickness increased in contrast, the figure of merit decreased because of the increase in dielectric loss. Experimental results showed that increases in dielectric constant and tunability are always associated with larger dielectric loss, which effectively decrease the figure of merit. (C) 2002 Elsevier Science B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(02)00083-4
http://hdl.handle.net/11536/28872
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(02)00083-4
期刊: THIN SOLID FILMS
Volume: 408
Issue: 1-2
起始页: 194
结束页: 199
显示于类别:Articles


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