標題: | Non-polar a-plane GaN grown on LaAlO3 (001) substrate by pulsed laser deposition |
作者: | Ho, Yen-Teng Liang, Mei-Hui Hsiao, Feng-Ke Wang, Wei-Lin Peng, Chun-Yen Chen, Wei-Da Lee, Wei-I Chang, Li 材料科學與工程學系 電子物理學系 Department of Materials Science and Engineering Department of Electrophysics |
關鍵字: | X-ray diffraction;laser epitaxy;nitride |
公開日期: | 1-四月-2008 |
摘要: | Non-polar (1 1 (2) over bar 0) GaN has been successfully grown on (0 0 1) LaAlO3 (LAO) substrate by pulsed laser deposition method. The nitrogen plasma is essential to grow pure a-plane GaN films. The insertion of a ZnO buffer layer improves the quality of GaN thin film as shown by X-ray diffraction. Reflection high energy electron diffraction and cross-sectional transmission electron microscopy with selected area diffraction reveal two types of a-plane GaN domains perpendicular to each other in orientation relationships of [0 0 0 1](GaN)parallel to[1 (1) over bar 0](LAO) and [1 (1) over bar 0 0](GaN)parallel to[1 (1) over bar 0](LAO). (C) 2007 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.jcrysgro.2007.11.047 http://hdl.handle.net/11536/29709 |
ISSN: | 0022-0248 |
DOI: | 10.1016/j.jcrysgro.2007.11.047 |
期刊: | JOURNAL OF CRYSTAL GROWTH |
Volume: | 310 |
Issue: | 7-9 |
起始頁: | 1614 |
結束頁: | 1618 |
顯示於類別: | 會議論文 |