標題: An error evaluation technique for the angle of incidence in a rotating element ellipsometer using a quartz crystal
作者: Chao, YF
Wang, MW
Ko, ZC
交大名義發表
National Chiao Tung University
公開日期: 7-Sep-1999
摘要: The error in the angle of incidence for a rotating element ellipsometer is evaluated using a uniaxial quartz crystal. At a fixed angle of incidence with respect to the surface of reflection, the ratio of reflectance in the parallel to that in the perpendicular electromagnetic field is measured by rotating the quartz crystal through a full cycle. We determine the deviation in the angle of incidence by comparing: the experimentally measured reflectance ratio to its calculated value.
URI: http://dx.doi.org/10.1088/0022-3727/32/17/315
http://hdl.handle.net/11536/31091
ISSN: 0022-3727
DOI: 10.1088/0022-3727/32/17/315
期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 32
Issue: 17
起始頁: 2246
結束頁: 2249
Appears in Collections:Articles


Files in This Item:

  1. 000082506300018.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.