Title: Analysis of AC electrical response for radio-frequency sputtered (Ba0.5Sr0.5)TiO3 thin film
Authors: Wang, YP
Tseng, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: barium strontium titanate oxide (BST);dielectric response;impedance;Cole plot
Issue Date: 1-Jun-1999
Abstract: Through the measurement of dielectric dispersion as a function of frequency (100 Hz less than or equal to f less than or equal to 1 MHz), we investigated the trapping dielectric relaxation of r.f.-sputtered (Ba0.5Sr0.5)TiO3 film and proposed an equivalent circuit on the basis of the admittance and capacitance spectra. Admittance spectral studies in the temperature range of 200-420 K revealed the existence of a trap level. The trap, located at 0.05 eV, is envisaged to be responsible for the origin of dielectric relaxation and carrier concentration. The equivalent circuit, consisting of a series trapping resistance and capacitance combination in parallel with leakage resistance and high frequency limit capacitance, is adopted to explain satisfactorily the AC response and to identify the contribution of the shallow trap on the electrical properties of BST thin film. (C) 1999 Elsevier Science S.A. All rights reserved.
URI: http://dx.doi.org/10.1016/S0040-6090(98)01497-7
http://hdl.handle.net/11536/31300
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(98)01497-7
Journal: THIN SOLID FILMS
Volume: 346
Issue: 1-2
Begin Page: 269
End Page: 274
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