標題: | Thermally driven polysilicon actuators for lateral displacement |
作者: | Wu, MF Lin, CH Hsu, WS 機械工程學系 Department of Mechanical Engineering |
公開日期: | 1-五月-1999 |
摘要: | A novel one-mask; polysilicon actuator driven by thermal expansion is developed, modeled and tested. The structures are heated by electric current due to resistive dissipation. Thermal strain is magnified by two mechanical mechanisms-lever and parallelogram. The device is tested in air and has a lateral 8 mu m-displacement by applying a low voltage (below 3.5 V). The critical current to reach melting point is about 67 mA with the input voltage less than 5 V. The simulation results by analytical and FEM schemes are compared with experimental data. The maximum output forces is measured with a built-in cantilever beam and is calculated to be about 3.3 mu N. |
URI: | http://dx.doi.org/10.1106/KX2A-2JG7-LRUV-6C2A http://hdl.handle.net/11536/31385 |
ISSN: | 1045-389X |
DOI: | 10.1106/KX2A-2JG7-LRUV-6C2A |
期刊: | JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES |
Volume: | 10 |
Issue: | 5 |
起始頁: | 402 |
結束頁: | 409 |
顯示於類別: | 期刊論文 |