熱動式橫向位移複晶矽制動器

Abstract

本篇在提出一熱動式橫向位移複晶矽制動器,其原理乃利用電流流經結構 體,產生電阻性功率消耗,用以加熱結構以產生熱應變,再經由兩種位移放 大機構,將熱應變放大。在結構模擬方面,本篇利用簡單力學理論,用以模 擬結構靜態行為,並與實驗量測做比較,獲得良好結果。在測試方面,元件 在常壓下,加4.2伏特的驅動電壓,能輸出8微米位移,且其最大輸出力 為3.3*10^ -6N。 A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two mechanical mechanisms - lever and The device is texted in air and has a lateral 8um-displacement by applying a 4.2V dc bias. The simulation results are shown to with experimental data well. The maximum output force is with a built-in cantilever beam and is calculated to be about 10^-6N.