EFFECT OF HYDROGEN ON DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX

doi:10.1007/BF00728611

標題:	EFFECT OF HYDROGEN ON DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
作者:	CHIU, HT CHANG, WP 交大名義發表應用化學系 National Chiao Tung University Department of Applied Chemistry
公開日期:	1-May-1992
URI:	http://dx.doi.org/10.1007/BF00728611 http://hdl.handle.net/11536/3448
ISSN:	0261-8028
DOI:	10.1007/BF00728611
期刊:	JOURNAL OF MATERIALS SCIENCE LETTERS
Volume:	11
Issue:	9
起始頁:	570
結束頁:	572
Appears in Collections:	Articles