ETHYLIMIDOTANTALUM COMPLEX AS PRECURSOR TO TANTALUM NITRIDE THIN-FILMS

標題:	ETHYLIMIDOTANTALUM COMPLEX AS PRECURSOR TO TANTALUM NITRIDE THIN-FILMS
作者:	CHIU, HT CHANG, WP 應用化學系 Department of Applied Chemistry
公開日期:	25-Aug-1991
URI:	http://hdl.handle.net/11536/3709
ISSN:	0065-7727
期刊:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	202
Issue:
起始頁:	74
結束頁:	INOR
Appears in Collections:	Articles