利用壓鑄法製作Bi0.5Sb1.5Te3熱電材料奈米線

Abstract

利用草酸與磷酸溶液分別對純鋁進行陽極處理，可生成孔徑80奈米與200奈米的陽極氧化鋁試片，再用鎳置換掉氧化鋁下方的鋁基材而成為耐高溫壓鑄的奈米模板。透過真空壓鑄法，將熔融的Bi0.5Sb1.5Te3熱電材料壓鑄進入奈米模板，得到直徑80奈米與200奈米的奈米線陣列。利用EDS確認壓鑄前後塊材與奈米線均維持元素化合比，利用TEM得知奈米線為沿著[001]方向生長的單晶結構，其結構為R-3m，與塊材相同。最後利用多探針奈米電性量測系統，量測奈米線的導電性質。

The AAO pore diameters of 80nm and 200nm can be fabricated by the utilization of Aluminum Anodic process in H2C2O4 and H3PO4, and replace the aluminum below barrier layer with Nickel to become a template which can fabricate nanowires at high temperature. Through the vacuum hydraulic injection process, the melted Bi0.5Sb1.5Te3 thermoelectric materials can be injected into a template and derive nanowires with diameter 80nm and 200nm.Using EDS, it is confirmed that bulk material and nanowire are stoichiometric before and after hydraulic injection process. By using TEM, it is revealed that nanowires are single crystal structure grown along the [001] direction. The crystal structure is R-3m, the same as bulk material. At last, the conductivity of nanowires is evaluated by the nano prober.