標題: A REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETER
作者: WENG, PK
SHIE, JS
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
公開日期: 1-Sep-1990
摘要: A new tachometric marker with a surface consisting of right-angle V grooves has been made by the silicon micromachining technique. Anisotropic etching on a (001) silicon surface by three conventional recipes has been adopted. The results of the etched qualities are compared; hydrazine hydrate and potassium hydroxide-isopropanol-water solutions can give good quality right-angle V grooves. The revolving retro-reflection effect associated with this marker is described. When placed on a rotating plane, it can be utilized for wide-angle and remote tachometric measurements, where proximity measurements are either impossible or dangerous.
URI: http://hdl.handle.net/11536/4022
ISSN: 0924-4247
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 24
Issue: 3
起始頁: 203
結束頁: 207
Appears in Collections:Articles